柔性铜基天线激光刻蚀制备及脊柱力-位感知系统应用

  早发性脊柱侧凸是一种在 10 岁以前出现的超过 10 度的脊柱畸形,严重者需要手术治疗以避免影响心肺功能，目前植入生长棒仍然是首选的治疗方案。本文基于早发性脊柱侧凸这一疾病，针对早发性脊柱侧凸患者的术后脊柱生长情况监测，旨在研发一种可体内无源力学及位移传感系统，实现新型生长友好型手术内植物的力学感知及位移感知。文中提出了一种基于 LC 谐振的无线无源柔性压力传感器，由柔性天线和电容式压力传感器组成，将其与生长棒技术结合用于脊柱力-位感知系统。

  研究中利用激光刻蚀技术制备柔性天线，通过对激光参数的调节，优选确定了对于所用刻蚀材料的最佳刻蚀参数，实现了高精度和高效率的激光刻蚀加工，并通过实验和理论分析表明了该柔性天线具有良好的耐久性和可靠性以及良好的工程可行性和应用前景。采用表面呈金字塔状弹性细微构造的 PDMS 作为电介质层，搭配激光刻蚀而成的叉指电极，并运用聚酰亚胺薄膜胶粘封装技术，成功制备了电容型压力传感器，通过其灵敏度、反应速度和稳定性进行综合性评估，筛选出了灵敏度表现最为杰出的柔性压力感应元件。将柔性天线与柔性电容式压力传感器集成在一起组成了基于 LC 谐振的无线柔性压力传感器，用于脊柱力-位感知系统评估分析其性能。研究结果表明，所制备的无线无源柔性压力传感器在脊柱力-位感知系统中实现无线力-位传感具有可行性，有望用于无源力学及位移传感系统，实现新型生长友好型手术内植物的力学感知及位移感知。

[1] ZHANG Y, SHI Z Y, LI X F, et al. A porcine model of early-onset scoliosiscombined with thoracic insufficiency syndrome: Construction and TranscriptomeAnalysis[J]. Gene, 2023, 858:147202.
[2] LI Y, YANG D, BERGMAN R, et al. Preoperative left shoulder elevation >1 cm ispredictive of severe postoperative shoulder imbalance in early onset idiopathicscoliosis patients treated with growth-friendly instrumentation[J]. Spine deformity,2023, 11(5): 1157-1167.
[3] YANG H H, LIU L, HAI Y, et al. Reliability and validity of the Chinese version ofthe Early-Onset Scoliosis Self-Report Questionnaire in children aged 8 to 18 years with early-onset scoliosis[J]. Translational pediatrics, 2023, 12 (7): 1336-1351.
[4] HAI Y, YANG H H, KANG N, et al. Distal foundation augmentation enhances the"Bridge" role of single traditional growing rods in the treatment of severe early-onset scoliosis: a retrospective comparative cohort study[J]. Translational pediatrics,2023, 12 (3): 331-343.
[5] 徐洁涛, 王冰. 十五年的回首，早发性特发性脊柱侧凸经历了什么? 中南大学湘雅二医院脊柱外科, 2018. https://www.orthonline.com.cn/node/133923.
[6] 何沛檐, 裴葆青, 王唯等. 生长棒不同固定术式治疗早发性脊柱侧凸的生物力学分析[J]. 医用生物力学, 2021, 36 (06): 849-854.
[7] OH Y S, KIM J H, XIE Z H, et al. Battery-free, wireless soft sensors for continuous multi-site measurements of pressure and temperature from patients at risk forpressure injuries [J]. Nature Communications, 2021, 12 (1): 5008-5008.
[8] RUTH S R A, KIM M G, ODA H, et al. Post-surgical wireless monitoring of arterial health progression[J]. iScience, 2021, 24 (9): 103079-103079.
[9] DONG Z Y, LI Z P, YANG F Y, et al. Sensitive readout of implantable microsensors using a wireless system locked to an exceptional point[J]. Nature Electronics, 2019,2 (8): 335-342.
[10] BOUTRY C M, BEKER L, KAIZAWA Y, et al. Biodegradable and flexible arterial-pulse sensor for the wireless monitoring of blood flow[J]. Nature biomedicalengineering, 2019, 3 (1): 47-57.
[11] HAJIAGHAJANI A, AFANDIZADEH Z A H, DAUTTA M, et al. Textile-integratedmetamaterials for near-field multibody area networks [J]. Nature Electronics, 2021,4 (11): 808-817.
[12] LIN R Z, KIM H J, ACHAVANANTHADITH S, et al. Wireless battery-free bodysensor networks using near-field-enabled clothing[J]. Nature communications, 2020,11 (1): 444.
[13] GALLI V, SALIAPU S K, CUTHBERT T J, et al. Passive and Wireless All-TextileWearable Sensor System[J]. Advanced science, 2023, 10 (22): 2206665.
[14] WANG H Y, WANG J Q, YAO K M, et al. A paradigm shift fully self-powered long-distance wireless sensing solution enabled by discharge-induced displacement current[J]. Science advances, 2021, 7 (39): eabi6751.
[15] GUO Y J, YIN F F, LI Y, et al. Incorporating Wireless Strategies to WearableDevices Enabled by a Photocurable Hydrogel for Monitoring Pressure Information[J].Advanced Materials, 2023, 35 (29): 2300855.
[16] LIN X, SUN L J, PAN J Y, et al. All-MXene-Printed RF Resonators as WirelessPlant Wearable Sensors for In Situ Ethylene Detection[J]. Small, 2023, 19 (24):2207889.
[17] BOBINGER M, HAIDER M, GOLIYA Y, et al. On the sintering of solution-basedsilver nanoparticle thin-films for sprayed and flexible antennas[J]. Nanotechnology,2018, 29 (48): 485701.
[18] SHARMA P K, GUPTA N, DANKOV P I. Analysis of Dielectric Properties ofPolydimethylsiloxane (PDMS) as a Flexible Substrate for Sensors and AntennaApplications[J]. IEEE Sensors Journal, 2021, 21(17): 19492-19499.
[19] KIM Y, MIN J S, JIHO S, et al. Chip-less wireless electronic skins by remoteepitaxial freestanding compound semiconductors. [J]. Science (New York, N.Y.),2022, 377 (6608): 859-864.
[20] ZHANG H S, ZHU J, ZHANG Y Y, et al. Standalone Stretchable RF Systems Based on Asymmetric 3D Microstrip Antennas With on-body Wireless Communication and Energy Harvesting[J]. Nano Energy, 2022,96: 107069.
[21] ZHAO Y, ZHANG S, YU T H, et al. Ultra-conformal skin electrodes withsynergistically enhanced conductivity for long-time and low-motion artifactepidermal electrophysiology[J]. Nature Communications, 2021,12 (1): 4880.
[22] HAJIAGHAJANI A, RWEI P, ZARGARI A H A, et al. Amphibious epidermal areanetworks for uninterrupted wireless data and power transfer[J]. NatureCommunications, 2023, 14 (1): 7522.
[23] ZHANG Y, ZHANG W F, YE G, et al. Core-Sheath Stretchable Conductive Fibers for Safe Underwater Wearable Electronics[J]. Advanced Materials Technologies,2020, 5 (1): 1900880.
[24] TIAN X, ZENG Q H, KURT S A, et al. Implant-to-implant wireless networking with metamaterial textiles[J]. Nature communications, 2023, 14 (1): 4335.
[25] LIN R Z, KIM H J, ACHAVANANTHADITH S, et al. Digitally-embroidered liquid metal electronic textiles for wearable wireless systems[J]. Nature Communications,2022, 13 (1): 2190.
[26] 于东辉. 基于 PDMS 的柔性可形变天线研究与设计[D]. 电子科技大学, 2022.
[27] 王宗辉. 喷墨打印图案化导电薄膜及其在柔性电子器件中的应用[D]. 南京邮电大学, 2022.
[28] 张宏伟. 激光刻蚀聚酰亚胺基底金属薄膜的温度场研究[D]. 兰州理工大学, 2016.
[29] YAMAGISHI K, ZHOU W S, CHING T, et al. Ultra-Deformable and Tissue-Adhesive Liquid Metal Antennas with High Wireless Powering Efficiency[J].Advanced materials, 2021, 33 (26): 2008062.
[30] ZHANG Y F, HUO Z H, WANG X D, et al. High precision epidermal radiofrequency antenna via nanofiber network for wireless stretchable multifunctionelectronics[J]. Nature communications, 2020, 11 (1): 5629.
[31] SHAO Y Z, WEI L S, WU X Y, et al. Room-temperature high-precision printing of flexible wireless electronics based on MXene inks[J]. Nature Communications, 2022,13 (1): 3223.
[32] LV S W, YE S Y, CHEN C L, et al. Reactive inkjet printing of graphene basedflexible circuits and radio frequency antennas[J]. JOURNAL OF MATERIALSCHEMISTRY C, 2021, 9 (38): 13182-13192.
[33] ZHAO W W, NI H, DING C B, et al. 2D Titanium carbide printed flexibleultrawideband monopole antenna for wireless communications[J]. Naturecommunications, 2023, 14 (1): 278.
[34] ZANG Y P, ZHANG F J, DI C A, et al. Advances of flexible pressure sensors toward artificial intelligence and health care applications[J]. Materials Horizons, 2015, 2 (2):140-156.
[35] CHEN K Y, XU Y T, ZHAO Y, et al. Recent progress in graphene-based wearable piezoresistive sensors: From 1D to 3D device geometries[J]. Nano Materials Science, 2023, 5 (3): 247-264.
[36] GAO Y, YAN C, HUANG H, et al. Microchannel-Confined MXene Based Flexible Piezoresistive Multifunctional Micro-Force Sensor[J]. Adv Funct Mater, 2020,30(11): 1909603.
[37] SAKHUJA N, KUMAR R, KATARE P, et al. Structure-Driven, Flexible,Multilayered, Paper-Based Pressure Sensor for Human-Machine Interfacing[J]. ACS Sustainable Chem Eng, 2022, 10(30): 9697-9706.
[38] LIN X, XUE H, LI F, et al. All-Nanofibrous Ionic Capacitive Pressure Sensor forWearable Applications[J]. ACS Appl Mater Interfaces, 2022, 14(27): 31385-31395.
[39] SHI Z Y, MENG L X, SHI X L, et al. Morphological Engineering of SensingMaterials for Flexible Pressure Sensors and Artificial Intelligence Applications[J].Nano-Micro Letters, 2022, 14 (1): 141.
[40] MANNSFELD S C B, TEE B C K, STOLTENBERG R M, et al. Highly sensitiveflexible pressure sensors with microstructured rubber dielectric layers[J]. Naturematerials, 2010, 9 (10): 859-864.
[41] WANG X L, XIA Z D, ZHAO C, et al. Microstructured flexible capacitive sensorwith high sensitivity based on carbon fiber-filled conductive silicon rubber[J].Sensors and Actuators A: Physical, 2020, 312: 112147.
[42] PRUVOST M, SMIT W J, MONTEUX C, et al. Polymeric foams for flexible andhighly sensitive low-pressure capacitive sensors[J]. npj Flexible Electronics, 2019, 3(1): 1500169-1003.
[43] LI S ,LU D ,LI S P, et al. Bioresorbable, wireless, passive sensors for continuous pH measurements and early detection of gastric leakage. [J]. Science advances, 2024, 10(16): eadj0268-eadj0268.
[44] LIU T L, DONG Y, CHEN S L, et al. Battery-free, tuning circuit-inspired wireless sensor systems for detection of multiple biomarkers in bodily fluids. Scienceadvances, 2022, 8: eabo7049.
[45] YANG C, WU Q N, LIU J Q, et al. Intelligent wireless theranostic contact lens for electrical sensing and regulation of intraocular pressure. [J]. Nature communications, 2022, 13 (1): 2556-2556.
[46] LEE J, IHLE J S, PELLEGRINO S G, et al. Stretchable and suturable fibre sensors for wireless monitoring of connective tissue strain[J]. Nature Electronics, 2021, 4 (4):291-301.
[47] HERBERT R, LIM H R, RIGO B, et al. Fully implantable wireless batterylessvascular electronics with printed soft sensors for multiplex sensing ofhemodynamics[J]. Science advances, 2022, 8 (19): eabm1175.
[48] KWON K, KIM U J, WON M S, et al. A battery-less wireless implant for thecontinuous monitoring of vascular pressure, flow rate and temperature[J]. Naturebiomedical engineering, 2023, 7 (10): 1215-1228.
[49] 张运海. 聚合物材料表面激光改性与刻蚀研究[D]. 山东师范大学, 2005.
[50] YANG Q S, HU Z Y, SEO M H, et al. High-speed, scanned laser structuring ofmulti-layered eco/bioresorbable materials for advanced electronic systems[J]. Nature communications, 2022, 13 (1): 6518.
[51] THEURING M, STEENHOFF V, GEIBENDÖRFER S, et al. Laser perforatedultrathin metal films for transparent electrode applications[J]. Optics express, 2015,23 (7) : A254-262.
[52] LI X K, ZHOU X W, CHEN J L, et al. Laser-Patterned Copper Electrodes forProximity and Tactile Sensors[J]. Advanced Materials Interfaces, 2020, 7(4):1901845.
[53] QIN R Z, HU M J, ZHANG N B, et al. Flexible Fabrication of Flexible Electronics:A General Laser Ablation Strategy for Robust Large-Area Copper-BasedElectronics[J]. Advanced Electronic Materials, 2019, 5 (10) : 1900365.
[54] 王书廷. 激光烧蚀打印技术研究[D]. 长春理工大学, 2018.
[55] 杨青, 杜广庆, 陈烽等. 飞秒激光整形脉冲激发金膜的超快热弛豫特性[J]. 中国激光, 2014, 41 (05): 29-34.
[56] SOKOLOWSKI T K, BIALKOWSKI J, CAVALLERI A, et al.Transient States ofMatter during Short Pulse Laser Ablation[J]. Physical Review Letters, 1998, 81(1):224.
[57] 孙旭娟. 紫外纳秒激光烧蚀金属薄膜过程研究[D]. 天津大学, 2018.
[58] 张庆伟. 飞秒激光烧蚀技术制备柔性金属透明电极材料[D]. 宁波大学, 2021.
[59] COLLINS C C. Miniature Passive Pressure Transensor for Implanting in the Eye. IEEE Transactions on Bio-Medical Engineering, 1967, BME-14(2): 74.
[60] 邓文俊. LC 型多参数无源无线传感器的研究[D]. 东南大学, 2020.