Preparation and deep-UV solar-blind photovoltaic performance of AlYN-based MSM detector

Xu Jiang1; Yanxia Wu2,3; Jiawei Qi1; Ying Liu2; Yongsheng Wang2; Bing Zhou2; Shengwang Yu2; Xiaoyan Zhou4

2024

10.1109/JSEN.2024.3418585

IEEE Sensors Journal   影响因子和分区

2379-9153

Based on the benefits of AlN solar-blind ultraviolet (SUBV) detectors in the field of photovoltaics, rare earth element yttrium (Y) was doped and investigated to regulate the sensitization range of AlN films by dual-target co-sputtering with different Y target sputtering power. The results showed that the structure of the film changed from AlN (002) to mixture of AlYN (002) and (100) then to amorphous with increased Y content, accompanied with the transformation from pebble-like shape morphology to amorphous morphology. The adjusted band gap (5.65-4.51 eV) of AlYN films was widened by Y doped, notably, the film S4 (with Y content of 8.1 at.%) completely covered the solar-blind response band. Specially, there were AlYN and Y crystals formed in the film S2 (with Y content of 1.28 at.%) with low resistivity and high carrier mobility. Based on which, metal-semiconductor-metal (MSM) type photodetectors (PDs) with Ag/Al/AlYN MSM IDE structures were fabricated, in which the film S2 exhibited the best photo-detection characteristics at -2 V bias, with photo-to-dark current ratio (PDCR), responsivity (R), external quantum efficiency (EQE), and specific detectivity (D*) of 154.9, 35.7 μA/W, 2.27 × 10-2% and 1.42 × 1010 Jones, respectively, while possessing significant self-powered characteristics (PDCR was 121.5).

EI

其他

ENGINEERING

1.Taiyuan University of Technology, Taiyuan, China
2.College of Materials Science and Engineering, Taiyuan University of Technology, Taiyuan, China
3.Lanzhou Institute of Chemical Physics, University of the Chinese Academy of Sciences, Lanzhou, China
4.Taizhou Research Institute, Southern University of Science and Technology, Taizhou, Zhejiang, China

Xu Jiang,Yanxia Wu,Jiawei Qi,et al. Preparation and deep-UV solar-blind photovoltaic performance of AlYN-based MSM detector[J]. IEEE Sensors Journal,2024,PP(99).

Xu Jiang.,Yanxia Wu.,Jiawei Qi.,Ying Liu.,Yongsheng Wang.,...&Xiaoyan Zhou.(2024).Preparation and deep-UV solar-blind photovoltaic performance of AlYN-based MSM detector.IEEE Sensors Journal,PP(99).

Xu Jiang,et al."Preparation and deep-UV solar-blind photovoltaic performance of AlYN-based MSM detector".IEEE Sensors Journal PP.99(2024).