Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces

Zhang, Yuan1; Zhou, Xiaomeng2; Zhang, Nian3; Zhu, Jiaqi1; Bai, Ningning1; Hou, Xingyu1; Sun, Tao4; Li, Gang1; Zhao, Lingyu1; Chen, Yingchun5; Wang, Liu3,6; Guo, Chuan Fei1

2024-04-08

10.1038/s41467-024-47408-z

NATURE COMMUNICATIONS   影响因子和分区

2041-1723

Flexible pressure sensors can convert mechanical stimuli to electrical signals to interact with the surroundings, mimicking the functionality of the human skins. Piezocapacitive pressure sensors, a class of most widely used devices for artificial skins, however, often suffer from slow response-relaxation speed (tens of milliseconds) and thus fail to detect dynamic stimuli or high-frequency vibrations. Here, we show that the contact-separation behavior of the electrode-dielectric interface is an energy dissipation process that substantially determines the response-relaxation time of the sensors. We thus reduce the response and relaxation time to similar to 0.04 ms using a bonded microstructured interface that effectively diminishes interfacial friction and energy dissipation. The high response-relaxation speed allows the sensor to detect vibrations over 10 kHz, which enables not only dynamic force detection, but also acoustic applications. This sensor also shows negligible hysteresis to precisely track dynamic stimuli. Our work opens a path that can substantially promote the response-relaxation speed of piezocapacitive pressure sensors into submillisecond range and extend their applications in acoustic range.

SCI

英语

第一 ; 通讯

The work was funded by the National Natural Science Foundation of China (No. T2225017 and 52073138), the Science Technology and Innovation Committee of Shenzhen Municipality (No. JCYJ20210324120202007), the Shenzhen Sci-Tech Fund (No. YTDPT20181011104007),["T2225017","52073138"] ; National Natural Science Foundation of China[JCYJ20210324120202007] ; Science Technology and Innovation Committee of Shenzhen Municipality[YTDPT20181011104007] ; Shenzhen Sci-Tech Fund[2021B1212040001]

Science & Technology - Other Topics

Multidisciplinary Sciences

WOS:001198902100014

NATURE PORTFOLIO

Web of Science

1.Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen 518055, Peoples R China
2.Chinese Acad Sci, Shenzhen Inst Adv Technol, CAS Key Lab Human Machine Intelligence Synergy Sys, Shenzhen 518055, Peoples R China
3.Univ Sci & Technol China, CAS Key Lab Mech Behav & Design Mat, Hefei 230000, Peoples R China
4.Southern Univ Sci & Technol, Dept Comp Sci & Engn, Shenzhen 518055, Peoples R China
5.Commercial Aircraft Corp China Ltd, Sci & Technol Comm, Shanghai 200126, Peoples R China
6.Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China

Zhang, Yuan,Zhou, Xiaomeng,Zhang, Nian,et al. Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces[J]. NATURE COMMUNICATIONS,2024,15(1).

Zhang, Yuan.,Zhou, Xiaomeng.,Zhang, Nian.,Zhu, Jiaqi.,Bai, Ningning.,...&Guo, Chuan Fei.(2024).Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces.NATURE COMMUNICATIONS,15(1).

Zhang, Yuan,et al."Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces".NATURE COMMUNICATIONS 15.1(2024).