南方科技大学知识苑(SUSTech KC): Machinability of MoS<sub>2</sub> after Oxygen Plasma Treatment under Mechanical Scanning Probe Lithography

题名	Machinability of MoS₂ after Oxygen Plasma Treatment under Mechanical Scanning Probe Lithography
作者	He, Yang1,2,3 ; Su, Xing 4; Hai, Kuo 4
通讯作者	Su, Xing; Hai, Kuo
发表日期	2024-03-01
DOI	10.3390/cryst14030280
发表期刊	CRYSTALS 影响因子和分区
EISSN	2073-4352
卷号	14 期号:3
摘要	The surface of molybdenum disulfide (MoS2) underwent oxygen plasma treatment to enhance its machinability and mitigate the tearing effects commonly associated with mechanical forces on 2D materials. This treatment led to the oxidation of the atoms on the top 1-3 layers of MoS2, resulting in the formation of MoO3 on the surface. During mechanical scanning probe lithography (m-SPL), only the surface oxide layer was uniformly removed, with material accumulation occurring predominantly on one side of the machined area. The resolution of the machining process was significantly enhanced via dynamic lithography while maintaining atomic-level smoothness in the machined area. Importantly, these techniques only removed the surface oxide layer, preserving the integrity of the underlying MoS2 surface, which was pivotal in avoiding damage to the original material structure. This study provided valuable insights and practical guidance for the nanofabrication of transition metal dichalcogenides (TMDCs) nanodevices, demonstrating a method to finely tune the machining of these materials.
关键词	atomic force microscopy machinability TMDCs scanning probe lithography oxygen plasma
相关链接	[来源记录]
收录类别	SCI
语种	英语
学校署名	第一
WOS研究方向	Crystallography ; Materials Science
WOS类目	Crystallography ; Materials Science, Multidisciplinary
WOS记录号	WOS:001192012500001
出版者	MDPI
来源库	Web of Science
引用统计	被引频次[WOS]：1
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/788823
专题	工学院_力学与航空航天工程系南方科技大学
作者单位	1.Southern Univ Sci & Technol, Shenzhen Key Lab Cross Scale Mfg Mech, Shenzhen 518055, Peoples R China 2.Southern Univ Sci & Technol, SUSTech Inst Mfg Innovat, Shenzhen 518055, Peoples R China 3.Southern Univ Sci & Technol, Dept Mech & Aerosp Engn, Shenzhen 518055, Peoples R China 4.Sichuan Precis & Ultraprecis Machining Engn Techno, Chengdu 610200, Peoples R China
第一作者单位	南方科技大学; 力学与航空航天工程系
第一作者的第一单位	南方科技大学
推荐引用方式 GB/T 7714	He, Yang,Su, Xing,Hai, Kuo. Machinability of MoS₂ after Oxygen Plasma Treatment under Mechanical Scanning Probe Lithography[J]. CRYSTALS,2024,14(3).
APA	He, Yang,Su, Xing,&Hai, Kuo.(2024).Machinability of MoS₂ after Oxygen Plasma Treatment under Mechanical Scanning Probe Lithography.CRYSTALS,14(3).
MLA	He, Yang,et al."Machinability of MoS₂ after Oxygen Plasma Treatment under Mechanical Scanning Probe Lithography".CRYSTALS 14.3(2024).