Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

Zhang, Yi1,2; Jiang, Yang1,2; Tang, Chuying2; Deng, Chenkai2; Du, Fangzhou2; He, Jiaqi2; Hu, Qiaoyu2; Wang, Qing2; Yu, Hongyu2; Wang, Zhongrui1

2024-02-01

10.3390/mi15020195

MICROMACHINES   影响因子和分区

2072-666X

The piezoelectric thin film composed of single-crystal lithium niobate (LiNbO3) exhibits a remarkably high electromechanical coupling coefficient and minimal intrinsic losses, making it an optimal material for fabricating bulk acoustic wave resonators. However, contemporary first-order antisymmetric (A1) Lamb mode resonators based on LiNbO3 thin films face specific challenges, such as inadequate mechanical stability, limited power capacity, and the presence of multiple spurious modes, which restrict their applicability in a broader context. In this paper, we present an innovative design for A1 Lamb mode resonators that incorporates a support-pillar structure. Integration of support pillars enables the dissipation of spurious wave energy to the substrate, effectively mitigating unwanted spurious modes. Additionally, this novel approach involves anchoring the piezoelectric thin film to a supportive framework, consequently enhancing mechanical stability while simultaneously improving the heat dissipation capabilities of the core.

lithium niobate acoustic resonators A1 mode spurious modes power capacity

SCI ; EI

英语

通讯

Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics

Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied

WOS:001168485700001

MDPI

Web of Science

1.Univ Hong Kong, Fac Engn, Hong Kong 999077, Peoples R China
2.Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China

Zhang, Yi,Jiang, Yang,Tang, Chuying,et al. Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures[J]. MICROMACHINES,2024,15(2).

Zhang, Yi.,Jiang, Yang.,Tang, Chuying.,Deng, Chenkai.,Du, Fangzhou.,...&Wang, Zhongrui.(2024).Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures.MICROMACHINES,15(2).

Zhang, Yi,et al."Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures".MICROMACHINES 15.2(2024).