| 题名 | MEMS Electrostatic Energy Harvester with Rechargeable Electret by Built-in Corona Tips |
| 作者 | |
| 发表日期 | 2023-06-29
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| ISSN | 2167-0013
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| ISBN | 979-8-3503-3302-2
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| 会议录名称 | |
| 会议日期 | 25-29 June 2023
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| 会议地点 | Kyoto, Japan
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| 摘要 | This paper presents an electrostatic vibration energy harvester (e-VEH) fabricated by advanced MEMS technology with perforated through-holes and built-in silicon corona tips. The perforated holes distributed on the device could reduce the energy loss due to the air damping and therefore increase the output power of the device. Meanwhile, once the charges of electret decay in harsh environment with high temperature, the integrated tips could effectively recharge it without breaking the packaged device. After self-recharging, the e-VEH device could still harvest energy and successfully light up a LED, which exhibits promising applications for self-powered electronics. |
| 学校署名 | 第一
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| 相关链接 | [IEEE记录] |
| 成果类型 | 会议论文 |
| 条目标识符 | http://sustech.caswiz.com/handle/2SGJ60CL/789100 |
| 专题 | 工学院_深港微电子学院 |
| 作者单位 | School of Microelectronics, Southern University of Science and Technology, China |
| 第一作者单位 | 深港微电子学院 |
| 第一作者的第一单位 | 深港微电子学院 |
| 推荐引用方式 GB/T 7714 |
Anxin Luo,Mingjie Li,Wenxin Luo,et al. MEMS Electrostatic Energy Harvester with Rechargeable Electret by Built-in Corona Tips[C],2023.
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| 条目包含的文件 | 条目无相关文件。 | |||||
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