Tension-Induced MOEMS Graphene Resonant Pressure Sensor

Yujian Liu1; Cheng Li1,2; Zhengwei Wu3; Shangchun Fan2; Zhen Wan1; Song Han4

2023-06-29

2167-0013

979-8-3503-3302-2

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

25-29 June 2023

Kyoto, Japan

Graphene micro-resonators could be utilized for high-sensitivity pressure sensing. In this paper, a tension-induced micro-opto-electro-mechanical systems (MOEMS) graphene resonant pressure sensor was first reported to our knowledge. The fabrication process involved the use of anodic bonding and fiber optic sensing technology to construct a hermetically sealed vacuum cavity, which allowed the graphene resonant sensor to operate at pressures exceeding one atmosphere with full-scale stably high quality factors. Pressure test in the range of 0-100 kPa revealed a pressure sensitivity of 2 Hz/Pa, as well as a minimal temperature drift of only 0.014%/℃ in the range of 0-50 ć , which is merely 0.45% of the electrical counterpart. This novel structural design offers a promising avenue for developing pressure sensors using two-dimensional (2D) material resonators.

其他

1.School of Instrumentation and Optoelectronic Engineering, Beihang University, China
2.Shenzhen Institute of Beihang University, China
3.Aerospace Information Research Institute, Chinese Academy of Sciences, China
4.School of Innovation and Entrepreneurship, Southern University of Science and Technology, China

Yujian Liu,Cheng Li,Zhengwei Wu,et al. Tension-Induced MOEMS Graphene Resonant Pressure Sensor[C],2023.