南方科技大学知识苑(SUSTech KC): Low-loss and Thermal-stable Ta2O5 Photonic Platform with Low-temperature Process

题名	Low-loss and Thermal-stable Ta2O5 Photonic Platform with Low-temperature Process
作者	Zhaoting Geng 1; Weiren Cheng1 ; Zhenyu Liu1 ; Mingjian You1 ; Xiaolun Yu 1; Pengzhuo Wu1 ; Ning Ding 1 ; Xingyu Tang1 ; Yihan Liu1 ; Li Shen 2; Qiancheng Zhao1
发表日期	2024-03-28
ISBN	979-8-3503-7758-3
会议录名称	2024 Optical Fiber Communications Conference and Exhibition (OFC)
会议日期	24-28 March 2024
会议地点	San Diego, CA, USA
摘要	We demonstrate a Ta2O5 photonic platform with a propagation loss of 0.5dB/cm and a thermo-optic coefficient of 2.3×10-6 /K at 1550 nm. The process temperature is below 350℃, friendly to integration with other optoelectronic components.
学校署名	第一
相关链接	[IEEE记录]
成果类型	会议论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/789201
专题	工学院_深港微电子学院
作者单位	1.School of Microelectronics, MOE Engineering Research Center of Integrated Circuits for Next Generation Communications, Southern University of Science and Technology, Shenzhen, China 2.Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China
第一作者单位	深港微电子学院
第一作者的第一单位	深港微电子学院
推荐引用方式 GB/T 7714	Zhaoting Geng,Weiren Cheng,Zhenyu Liu,et al. Low-loss and Thermal-stable Ta2O5 Photonic Platform with Low-temperature Process[C],2024.