南方科技大学知识苑(SUSTech KC): Highly efficient figuring of Si mirrors using an atmosphere plasma jet with concentrated electric field

题名	Highly efficient figuring of Si mirrors using an atmosphere plasma jet with concentrated electric field
作者	Deng, Hui1 ; Wu, Bing 1 ; Zhang, Junqi1 ; Zhang, Zhe 2; Zhang, Xinquan 2
通讯作者	Zhang, Xinquan
发表日期	2024
DOI	10.1016/j.cirp.2024.04.091
发表期刊	CIRP ANNALS-MANUFACTURING TECHNOLOGY 影响因子和分区
ISSN	0007-8506
EISSN	1726-0604
卷号	73 期号:1
摘要	Si mirrors with nanometre-level accuracy are required for enhancing X-ray focusing performance but suffer from low manufacturing efficiency. Hereto, a new capacitively coupled plasma jet with a concentrated electric field is developed for highly efficient figuring of Si mirrors. The experimental results show that a high material removal rate, a stable removal function and strong linearity between removal volume and dwell time are realized. The form error of a 100x50 mm2 Si mirror can be reduced from 110.4 to 7.4 nm RMS within 36.5 min. This work provides a new strategy for the high-efficiency figuring of Si mirrors. (c) 2024 CIRP. Published by Elsevier Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies.
关键词	Plasma Accuracy Figuring
相关链接	[来源记录]
收录类别	SCI ; EI
语种	英语
学校署名	第一
资助项目	National natural science foundation of China["52035009","52375437"]
WOS研究方向	Engineering
WOS类目	Engineering, Industrial ; Engineering, Manufacturing
WOS记录号	WOS:001276927500001
出版者	ELSEVIER
ESI学科分类	ENGINEERING
来源库	Web of Science
引用统计
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/789972
专题	工学院_机械与能源工程系
作者单位	1.Southern Univ Sci & Technol, Shenzhen Engn Res Ctr Semicond Specif Equipment, Dept Mech & Energy Engn, 1088 Xueyuan Rd, Shenzhen 518055, Guangdong, Peoples R China 2.Shanghai Jiao Tong Univ, Sch Mech Engn, Shanghai 200240, Peoples R China
第一作者单位	机械与能源工程系
第一作者的第一单位	机械与能源工程系
推荐引用方式 GB/T 7714	Deng, Hui,Wu, Bing,Zhang, Junqi,et al. Highly efficient figuring of Si mirrors using an atmosphere plasma jet with concentrated electric field[J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY,2024,73(1).
APA	Deng, Hui,Wu, Bing,Zhang, Junqi,Zhang, Zhe,&Zhang, Xinquan.(2024).Highly efficient figuring of Si mirrors using an atmosphere plasma jet with concentrated electric field.CIRP ANNALS-MANUFACTURING TECHNOLOGY,73(1).
MLA	Deng, Hui,et al."Highly efficient figuring of Si mirrors using an atmosphere plasma jet with concentrated electric field".CIRP ANNALS-MANUFACTURING TECHNOLOGY 73.1(2024).