Threshold voltage modulation on a CTL-based monolithically integrated E/D-mode GaN inverters platform with improved voltage transfer performance

This work demonstrates a high-performance monolithically integrated GaN inverters platform, which incorporates enhancement-mode (E-mode) and depletion-mode (D-mode) GaN high-electron-mobility transistors (HEMTs) simultaneously using an Al:HfOx-based charge trapping layer. The developed E-mode HEMT exhibits a positive threshold voltage of 2.6 V, a high ON-OFF current ratio of 1.9 × 10⁸, a current density of 376 mA/mm, and an ON-resistance of 15.31 Ω·mm. Moreover, the direct-coupled field-effect-transistor logic (DCFL) GaN inverter was characterized with and without D-mode device threshold voltage (VTH) modulation, demonstrating improved output swing and switching threshold shift by proposed VTH modulation. The optimized DCFL GaN inverter manifests a switching threshold of 2.34 V, a logic voltage output swing of 4.98 V, and substantial logic-low and logic-high noise margins of 2.16 and 2.49 V, respectively, at a supply voltage of 5 V. These results present a promising approach toward realizing monolithically integrated GaN logic circuits for power IC applications.