Magnet-Assisted GaN Monolithically Integrated Device for Optical Three-Axis Motion Sensing

Liu, Zecong1,2; Chen, Tingxuan1,3; Zhu, Ling3; Guan, Xun2; Li, Kwai Hei1

2024-08-01

10.1021/acsphotonics.4c00945

ACS PHOTONICS   影响因子和分区

2330-4022

Motion sensors, capable of detecting acceleration and inclination along the three axes, are essential in emerging domains of robotics, autonomous vehicles, and virtual reality technologies. To meet the growing demands for precise and reliable motion tracking in cutting-edge applications, here, a compact three-axis motion sensor is developed utilizing a monolithically integrated GaN-based optoelectronic device with split-type magnets. The sensor demonstrates a linear response across an acceleration measurement range of +/- 10 g for the X- and Y-axes and +/- 5 g for the Z-axis. It also exhibits fast response and recovery times of 1.50 and 1.03 ms, respectively, along with a minimum detection limit of 0.035 g. The sensor is capable of precisely detecting the tipping angle and acceleration of the dump truck as well as assessing the posture and motion status of unmanned aerial vehicles. The developed sensor offers promising solutions for advancements in automated vehicle operation and robotic motion.

motion sensors GaN optoelectronic magneticassist three-axis acceleration sensors

SCI ; EI

英语

第一 ; 通讯

National Key R&D Program of China[2021YFA1001000] ; National Natural Science Foundation of China["U23A20282","12074170","62204159"] ; Shenzhen Science, Technology and Innovation Commission via Fundamental Research Scheme General Program[JCYJ20220530142809022] ; Shenzhen Fundamental Research Program[JCYJ20220530113201003] ; Guangdong Basic and Applied Basic Research Foundation["2023A1515010082","WDZC20220811170401001"]

Science & Technology - Other Topics ; Materials Science ; Optics ; Physics

Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Optics ; Physics, Applied ; Physics, Condensed Matter

WOS:001291121900001

AMER CHEMICAL SOC

Web of Science

1.Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
2.Tsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R China
3.Shenzhen Univ, State Key Lab Radio Frequency Heterogeneous Integr, Shenzhen 518060, Peoples R China

Liu, Zecong,Chen, Tingxuan,Zhu, Ling,et al. Magnet-Assisted GaN Monolithically Integrated Device for Optical Three-Axis Motion Sensing[J]. ACS PHOTONICS,2024.

Liu, Zecong,Chen, Tingxuan,Zhu, Ling,Guan, Xun,&Li, Kwai Hei.(2024).Magnet-Assisted GaN Monolithically Integrated Device for Optical Three-Axis Motion Sensing.ACS PHOTONICS.

Liu, Zecong,et al."Magnet-Assisted GaN Monolithically Integrated Device for Optical Three-Axis Motion Sensing".ACS PHOTONICS (2024).