Miniaturized GaN-Based Optical Hydrophones for Underwater Low-Frequency Acoustic Detection

Liushu Pan1,2; Shengquan Li1; Jian Chen1,2; Mingcheng Luo1; Long Zhang1; Linbojie Huang1; Kwai Hei Li1,2; Xinke Tang1

2024

10.1109/LPT.2024.3454151

IEEE Photonics Technology Letters   影响因子和分区

1941-0174

In this letter, the fabrication and characterization of a miniaturized optical hydrophone for detecting underwater acoustic signals is demonstrated. A light emitter and detector are fabricated on a GaN-based device at chip scale through the monolithic integration approach. By incorporating a deformable PDMS film embedded with TiO2 nanoparticles, the sound vibration can be effectively converted into photocurrent changes. The millimeter-sized hydrophone can detect hydro-acoustic signals ranging from 0.1 Hz to 250 Hz, with an optimum sensitivity of 2.3×10-14 A/μPa at around 48 Hz and a minimum detectable pressure of about 4 Pa. It is capable of distinguishing waves originating from two distinct acoustic sources with a frequency difference as low as 0.2 Hz. This cost-effective, chip-scale design with high stability holds great potential for a variety of applications that necessitate identifying low-frequency acoustic signals in underwater environments.

其他

1.Peng Cheng Laboratory, Shenzhen, China
2.School of Microelectronics, Southern University of Science and Technology, Shenzhen, China

Liushu Pan,Shengquan Li,Jian Chen,et al. Miniaturized GaN-Based Optical Hydrophones for Underwater Low-Frequency Acoustic Detection[J]. IEEE Photonics Technology Letters,2024,PP(99).

Liushu Pan.,Shengquan Li.,Jian Chen.,Mingcheng Luo.,Long Zhang.,...&Xinke Tang.(2024).Miniaturized GaN-Based Optical Hydrophones for Underwater Low-Frequency Acoustic Detection.IEEE Photonics Technology Letters,PP(99).

Liushu Pan,et al."Miniaturized GaN-Based Optical Hydrophones for Underwater Low-Frequency Acoustic Detection".IEEE Photonics Technology Letters PP.99(2024).