Porous Graphene-Based Flexible On-Chip Microsupercapacitors Enabled by Chitosan Oligosaccharide Laser Lithograph

Qian-Ming Huang1,2; Huiru Yang1,2; Shaogang Wang1,3; Guoqi Zhang3; Paddy French3; Huaiyu Ye1,3

10.1109/NEMS60219.2024.10639907

2024-05-05

2474-3747

979-8-3503-5984-8

2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

2-5 May 2024

Kyoto, Japan

This research introduces a novel and convenient technology, chitosan oligosaccharide laser lithography (COSLL), enabling the creation of flexible laser-induced graphene (LIG) on-chip microsupercapacitors (MSCs) using environmentally friendly chitosan-class polymers for the first time. MSCs prepared through COSLL exhibit a significant areal capacitance exceeding 4 mF cm–2, comparable to that of the polyimide-LIG-based counterparts. COSLL seamlessly integrates with the micro-nano thin-film process, allowing the capacitance of resulting LIG/Au MSCs to be further increased to about 8 mF cm–2. Leveraging an eco-friendly biomass carbon source and featuring a convenient process flowchart, COSLL emerges as an appealing method for fabricating flexible LIG on-chip MSCs.

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1.School of Microelectronics, Southern University of Science and Technology, Shenzhen, China
2.Harbin Institute of Technology, Harbin, China
3.Faculty of EEMCS, Delft University of Technology, Delft, The Netherlands

Qian-Ming Huang,Huiru Yang,Shaogang Wang,et al. Porous Graphene-Based Flexible On-Chip Microsupercapacitors Enabled by Chitosan Oligosaccharide Laser Lithograph[C],2024.